Symposium 'Quantum Informatics - 2012'
   The International Conference Micro- and Nanoelectronics 2012 (ICMNE-2012) with the Extended Session "Quantum Informatics" (QI-2012) and the Workshop "Silicon-on-Insulator" (SOI-2012) will be held during October 1-5, 2012 at the Lipki resort in Zvenigorod, Moscow Region, Russia.

   It continues the series of the International Conferences "ICMNE-2003", "QI-2004", "ICMNE-2005", "QI-2005", "ICMNE-2007", "QI-2007", "ICMNE-2009", and "QI-2009".
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   Information on ICMNE-2003
 














ICMNE-2003

The full text of papers at conference Micro- and Nanoelectronics 2003 (ICMNE-2003) has been published in Proceedings of SPIE, vol.5401 (SPIE, Bellingham, WA, 2004), 762 pp.

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Version for print "CONFERENCE PROGRAM"
Version for print "POSTERS"

 

ICMNE 2003
CONFERENCE PROGRAM

Monday, October 6th, 2003

9.00 - Registration & Accommodation
13.00-14.00 Lunch

Conference hall

Special Session

16.00
S1-1

The Systems for Semiconductor Industry and Electron Beam Lithography LEO-SUPRA with electron-optic column "Gemini". A. Ul'yanenkov1, P. Czurratis2. 1. Carl Zeiss/LEO (Moscow office) 2. LEO Elektronenmikroskopie GmbH

16.30
S1-2
Microanalysis of nanostructures. F. Bauer.
OXFORD Instruments GmbH/Oxford Instruments Analytical Ltd.
17.00
S1-3
From scanning probe microscopes to smart nanotechnology facilities. V. Bykov, S. Saunin. NT-MDT & NTI Companies group, Moscow-Zelenograd, Russia
17.30
S1-4
Elaboration of gallium arsenide technology in Georgia for development of microelectronic devices. N. Khuchua 1, Z. Chakhnakia 1, L. Khvedelidze 1, R. Melkadze 1, A. Tutunjan 1, R. Diehl 2. 1. Research and Production Complex (RPC) "Electron Technology" of I.Javakhishvili Tbilisi State University, Tbilisi, Georgia; 2. III-V Electronics and Optoelectronics Hardheim, Germany.

 

18.00 Welcome Party
19.00 Dinner


Thursday, October 7th, 2003

Conference hall

8.30 Welcome remarks


E.P. Velikhov, Conference Chair, RSC "Kurchatov Institute", Moscow
K.A. Valiev, Program Chair, IPT RAS, Moscow


Plenary Session I

8.40
L1-1
INVITED: EUV lithography: Main challenges. V. Banine & J. Benschop, ASML, Veldhoven, the Netherlands
9.10
L1-2
INVITED: Ultra thin Silicon-On-Insulator structures for post silicon microelectronics. V. P. Popov, Institute of Semiconductor Physics, RAS, Novosibirsk, Russia
9.40
L1-3
INVITED: MBE Growth of Ultrasmall Coherent Ge Quantum Dots in Silicon for Applications in Nanoelectronics. O. P. Pchelyakov, A. I. Nikiforov, B. Z. Olshanetsky, S. A. Teys. Institute os Semiconductor Physics SB RAS, Novosibirsk, 630090, Russia
10.10
L1-4
INVITED: High-purity mono-isotopic 28Si, 29Si, 30Si. G. G. Devyatykh1, P. G. Sennikov1, A. V. Gusev1, A. D. Bulanov1, I. D. Kovalev1, A. K. Kaliteevskii2, O. N. Godisov2, H. Riemann3, N. V. Abrosimov3, H. - J. Pohl4. Institute of Chemistry of High-Purity Substances, RAS, Nizhny Novgorod, Russia; 2. STC "Centrotech-EchP", St.-Peterburg, Russia; 4. VITCON Projectconsult GmbH, Jena, Germany.

 

10.40-11.00 Coffee break.

Winter garden

Conference Hall

Session 1. Litho I

11.00
L1-5
INVITED: Process Optimization using Lithography Simulation. A. Erdmann. Fraunhofer Institute of Integrated Systems and Device Technology (IISB), Erlangen, Germany.
11.30
O1-1
New Method of 3D- Micro- and Nanostructures Production. B. Gurovich. Russian Research Center "Kurchatov Institute", Moscow, Russia
11.50
O1-2
Single-Domain Patterned Magnetic Media Produced by Selective Removal of Atoms. B. Gurovich, K. Maslakov, E. Kuleshova, E. Meilikhov. Russian Research Center "Kurchatov Institute", Moscow, Russia
12.10
O1-3
Scanning NanoImprinting by AFM like tool. O. Trofimov1, V. Dremov1,2, S. Dubonos1, A. Svintsov1, S. Zaitsev1. 1. Chernogolovka, Moscow distr., Russia; 2-Physikalisches Institut III Universitat Erlangen-Nurnberg Erwin-Rommel-Str. 1, Erlangen, Germany
12.30
O1-4
NanoMaker - a new soft/hardware system for nanotechnology and industrial e-beam lithography. G. Grigor'eva1, B. N. Gaifullin1, A. A. Svintsov2, S. I. Zaitsev2. IMT RAS, 1. INTERFACE Ltd, Moscow; 2. Chernogolovka, Russia

 

13.00-14.00 Lunch

Conference Hall

Session 2. Litho II

14.00
O1-5
The vortex mask design for irregular arrays of contact holes. P. G. Serafimovich, P. S. Ahn, J. K. Shin. Samsung Advanced Institute of Technology, Suwon, Korea
14.20
O1-6
Laser source of ions for nanotechology. B. G. Freinkman1, A. V. Eletskii2, S. I. Zaitsev2. 1. IMT RAS, Chernogolovka, Moscow distr., Russia; 2. RSC "Kurchatov Institute", Moscow.
14.40
O1-7
Laboratory methods for investigations of multilayer mirrors in Extreme Ultraviolet and Soft X-Ray region. M. S. Bibishkin, D. P. Chekhonadskih, N. I. Chkhalo, E. B. Klyuenkov, N. N. Salashchenko, I. G. Zabrodin, S. Yu. Zuev. Institute for Physics of Microstructures, RAS, Nizhny Novgorod, Russia
15.00
O1-8
EUV radiation from plasma of a pseudospark discharge in its different stages. Yu. D. Korolev, O. B. Frants, V. G. Geyman, R. V. Ivashov, N. V. Landl, I. A. Shemyakin. Institute of High Current Electronics, Tomsk, Russia
15.20
O1-9
Ion lithography using FIB. Yu. B. Gorbatov, A. F. Vyatkin. Institute of Microelectronics Technology, RAS, Chernogolovka, Russia.

 

Room A. Session 3. Nanotransistors

14.00
O1-10
FET on Ultrathin SOI (Fabrication and Research). O. V. Naumova, I. V. Antonova, V. P. Popov, Y. V. Nastaushev, T. A. Gavrilova, M. M. Kachanova L. V. Litvin, A. L. Aseev. Institute of Semiconductor Physics, Siberian Branch of RAS, Novosibirsk, Russia
14.20
O1-11
Static-induction transistor for VLSI logic elements. B. Konoplev, E. Ryndin. Taganrog State University of Radio-Engineering, Taganrog, Russia
14.40
O1-12
A transistor based on space quantization effect. E. Ryndin. Taganrog State University of Radio-Engineering, Taganrog, Russia
15.00
O1-13
Epitaxial growth of silicon on porous silicon. M. Balucani1, A. Belous2, V. Bondarenko3, G. Troyanova3, A. Ferrari1. 1. Unit of Research E6 INFM, Rome University "La Sapienza", Roma, Italy; 2. Research and Design Company "Belmicrosystems", Minsk, Belarus; 3. Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus.
15.20
O1-14
Structure Peculiarities of Metallic Films Produced by Selective Removal of Atoms. B. Gurovich, A. Domantovsky, K. Maslakov, E. Olshansky, K. Prikhodko. Russian Research Center "Kurchatov Institute", Moscow, Russia.

 

Room B. Session 4. Modelling

14.00
O1-15
The Structure and Electronic Properties of Zr and Hf Nitrides and Oxynitrides. D. Bazhanov1,2, A. Safonov1,3, A. Bagatur'yants1,3, A. Korkin4. 1. Kinetic Technologies, Ltd., Moscow, Russia; 2. Physics Department, Moscow State University, Moscow, Russia; 3. Photochemistry Center, RAS, Moscow, Russia; 4. DigitalDNA Semiconductor Products Sector, Motorola Inc., USA
14.20
O1-16
A Self-consistent Modeling of the Leakage Current Through Thin Oxides. I. Polishchuk1,2, E. Burovski1,2. 1. RRC "Kurchatov institute", Moscow; 2. Kinetic Technologies, Ltd, Moscow.
14.40
O1-17
The discretization of minority carrier generation kinetics at the semiconductor surface bordering staggered inhomogeneous insulator. Yu. V. Gulyaev, A. G. Zhdan, E. I. Goldman, G. V. Chucheva. The Institute of Radio Engineering and Electronics, RAS
15.00
O1-18
Analysis of the metal single-electron arrays based on different materials. I. I. Abramov, S. A. Ignatenko. Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus.
15.20
O1-19
Ensemble Monte Carlo simulation of submicron n-channel MOSFETs with account of hot electron effects. V. Borzdov, V. Galenchik, O. Zhevnyak, F. Komarov, A. Zyazulya. Belarussian State University, Minsk, Belarus

 

15.40-16.30 Coffee break

Conference Hall


Session 5. Micro- & nanostructures characterization

16.30
O1-20
Structural diagnostics of 'quantum' layers by X-ray diffraction and standing waves. A. M. Afanas'ev1, M. A. Chuev1, R. M. Imamov2, E. Kh. Mukhamedzhanov2, E. M. Pashaev2, S. N. Yakunin2. 1.Institute of Physics & Technology, RAS; 2.A.V.Shubnikov Institute of Crystallography, RAS
16.50
O1-21
Characterization of patterned nanomagnet arrays by scanning probe microscopy. N. I. Polushkin, B. A. Gribkov, and V. L. Mironov. Institute for Physics of Microstructures, RAS, Nizhny Novgorod, Russia
17.10
O1-22
Magnetic force microscopy of magnetization reversal of microstructures in situ in external field of up to 2000Oe. A. Bukharaev, D. Biziaev, P. Borodin, D. Ovchinnikov. Zavoisky Physical Technical Institute of RAS, Kazan, Russia.
17.30
O1-23
Study of PZT thin films of different compositions by atomic force microscopy. A. Ankudinov, I. Pronin, N. Pertsev, I. Titkov, A. Titkov. A.F.Ioffe Physico-Technical Institute, RAS, St.Petersburg, Russia.
17.50
O1-24
Local optical diagnostics of nanostructures. M. Bashevoy , A. Ezhov , S. Magnitskii, D. Muzychenko , V. Panov , J. Toursynov. Moscow State University, Russia
18.10
O1-25
Interface study of SiGe/Si multilayers by X-ray reflectivity method. S. N. Yakunin, A. A. Zaitsev, E. M. Pashaev, M. M. Rzaev, R. M. Imamov. 1. Institute of Crystallography, RAS, Russia; 2. Moscow Institute of Radio Engineering and Automatics, Russia; 3. P.N. Lebedev Physical Institute, RAS, Russia

 

Room A. Session 6. Nanostructures

16.30
O1-26
Local contact charging of semiconductor quantum dots by atomic force microscopy. A. N. Titkov1, M. S. Dunaevskii1, R. Laiho2. 1.Ioffe Physical-Technical Institute, RAS, St.-Peterburg, Russia; 2. Wihury Physical Laboratory, University of Turku, Finland.
16.50
O1-27
Selective growth oriented carbon nanotube. S. A. Gavrilov1, N. N. Dzbanovsky2, V. V. Dvorkin2, E. A. Il'ichev1, B. K. Medvedev1, E. A. Poltoratsky1, G. S. Rychkov1, N. V. Suetin2. 1. State Research Institute of Physical Problems, Russia; 2. Nuclear Physics Institute, Moscow State University, Russia
17.10
O1-28
Nanotubes for nanoelectronics: growth and characterization. S. V. Plusheva, I. V. Khodos, L. A. Fomin and G. M. Mikhailov. Institute of Microelectronics echnology RAS, Chernogolovka
17.30
O1-29
Glass-encapsulated Single-crystal Nanowires and Filiform Nanostructures Fabrication. E. Badinter1, T. Huber2, A. Ioisher1, A. Nikolaeva3, I. Starush1. 1.Institute ELIRI s.a., Moldova; 2.Howard University, USA; 3. Institute of Applied Physics, Moldova.
17.50
O1-30
Epitaxial SiC nanocrystals at the Si/SiO2 interface: electrical behaviour. L. Dozsa1, Zs. J. Horvath1, O. H. Krafcsik1, Gy. Vida2, P. Deak2, T. Mohacsy1. 1. Hungrian Academy of Sciences, Research Institute for Technical Physics and Materials Science, Budapest, Hungry; 2.Dept. of Atomic Physics, Budapest University of Technology and Economics, Budapest, Hungary
18.10
O1-31
Composite nanostructures based on porous silicon host. M. Balucani1, V. Bondarenko2, G. Troyanova2, A. Ferrari1. Unit of Research E6, INFM, Roma University "La Sapienza", Roma, Italy; 2. Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus

 

Room B. Session 7. Magnetic nanostructures.

16.30
O1-32
Approach to terabit density for magnetic data storage using direct optical patterning of Fe(Co)-based thin films. N. I. Polushkin, B. A. Gribkov, A. Ya. Lopatin. Institute of Physics of Microstructures, RAS, Nizhny Novgorod, Russia
16.50
O1-33
Ferroelectric barium-strontium titanate films: electrical properties, microstructure, applications. O. M. Zhigalina1, O. V. Chuprin2, K. A. Vorotilov2, V. A. Vasil'ev2, A. S. Sigov2, Yu. V. Grigoriev1, N. M. Kotova3. 1.Institute of Crystallography, RAS, Russia; 2.Moscow State Technical University of Radioengineering, Electronics and Automation, Moscow, Russia; 3. Institute of Physical Chemistry, Moscow, Russia.
17.10
O1-34
Magnetization reversal due to spin injection in magnetic junction. R. J. Elliott1, E. M. Epshtein2, Yu. V. Gulyaev2, P. E. Zilberman2. 1. University of Oxford Department of Physics, UK; 2. Institute of Radio Engineering and Electronics, RAS, Russia.
17.30
O1-35
Some peculiarities of longitudinal magneto-resistance in single crystal wires of pure and doped bismuth. D. Gitsu1, T. Huber2, L. Konopko1, A. Nikolaeva1,3. 1. Institute of Applied Physics, AS, Moldova; 2.Department of Chemistry, Woward University, Washington, USA; 3. International Laboratory of High Magnetic Fields and Low Temperatures, Wroclav, Poland.
17.50
O1-36

Research of optical and structural properties in multilayer films (Ni22ACo75A) x20L. G. Bauhuis2, A. Keen2, H. von Kempen2, A. Matvienko1, A. Ostroukhova1, A. Pogorely1, T. Rasing2. 1. Institute of Magnetism of NAS of Ukraine, Kiev, Ukraine .2. Research Institute for Materials, University of Nijmegen, Nijmegen, The Nitherlands

18.10
O1-37
Epitaxial Ni Films and Giant Magnetoresistance in Ballistic Ni Nanostructures. I. V. Malikov, V. Yu. Vinnichenko, L. A. Fomin and G. M. Mikhailov. Institute of Microelectronics Technology& High Purity Materials RAS, Chernogolovka, Moscow.

 

19.00 Dinner


Wednesday, October 8th 2003

07.50 Breakfast

Conference hall.

Session 8. Photonics

08.30
L2-6
INVITED: Elements of electron-photonic integrated systems. V. V. Aristov, M. Yu. Barabanenkov, V. N. Mordkovich. Institute of Microelectronics Technology and High Purity Materials RAS.
09.00
L2-7
INVITED: Macroporous silicon: material science and technology. A. F. Vyatkin. Institute of Microelectronics Technology and High Purity Materials RAS.
09.30
O2-38
1D photonic crystals based on periodically grooved Si. V. Tolmachev1, E. Astrova1, T. Perova2. 1. Ioffe Physico-Technical Institute, St.-Peterburg, Russia; 2. Dept. Electr.& Electr. Eng., Trinity College, Dublin, Ireland.
09.50
O2-39
White light emission from nanostructures embedded in ultra-shallow silicon p-n junctions. N. T. Bagraev, A. D. Bouravleuv, L. E. Klyachkin and A. M. Malyarenko. A.F. Ioffe Physico-Technical University, St.Petersburg, Russia.
10.10
O2-40
A 512 512 IR PtSi CMOS IMAGE SENSOR. S. Abramov, A. Belin, A. Gvaskov, V. Guminov, V. Zolotariov, V. Zoubkov, A. Popov, G. Rudakov, V. Rjabik, D. Churbanov. Matrix technologies inc.

 

10.30 Coffee break

Conference hall.

Session 9. Si/Ge heterostructures

11.00
O2-41
Spin transport in Ge/Si quantum dot array. A. V. Nenashev, A. F. Zinovieva, A. V. Dvurechenskii. Institute of Semiconductor Physics, RAS, Novosibirsk, Russia.
11.20
O2-42
Structural, photoluminescence and electrical properties of n-Si1-Ge/n+(p)-Si heterojunction in relaxed Si1-Ge/Si structure. L. K. Orlov1, A. V. Potapov1, M. L. Orlov1, V. I. Vdovin2, E. A. Steinman3, Zs. J. Horvath4, L. Dozsa4. 1.Institute for Physics of Microstructures, RAS, Nizhny Novgorod, Russia; 2. Institute for Chemical problems of Microelectronics, Moscow, Russia; 3. Institute of Solid State Physics, RAS, Chernogolovka, Russia; 4. Research Institute for Technical Physics and Materials Science, HAS, Budapest, Hungary.
11.40
O2-43
Electronic properties of the Si-Si1-Ge field effect transistor heterostructures: electrical and electrophysical measurements. L. K. Orlov , A. V. Potapov, N. L. Ivina, R. A. Rubtsova, Zs. Horvath, L. Dozsa, A. S. Lonchakov, Yu. A. Arapov. 1.Institute for Physics of Microstructures, RAS; 2. State Lobachevsky University, Nizhny Novgorod, Russia; 3. Research Institute for Technical Physics and Materials Science, HAS, Budapest, Hungary; 4. Institute of Metal Physics RAS, Ekaterinburg.
12.00
O2-44
Investigation of transport mechanisms in a-SiGe:H/c-Si heterostrucrures. A. Sherchenkov, B. Budaguan, A. Mazurov. Institute of Electronic Technology, Moscow, Russia.
12.20
O2-45
Implanted quantum-dimensional SiGe structures. N. N. Gerasimenko1 and Yu. V. Parhomenko2. 1. Moscow Institute of Electronic Engineering; 2. Moscow Institute of Steel and Alloys.
12.40
O2-46
Surface morphology transitions induced by ion beam action during Ge/Si MBE. A. V. Dvurechenskii, J. V. Smagina, V. A. Zinovyev, V. A. Armbrister. Institute of Semiconductors Physics of the Siberian Branch of the RAS, Novosibirsk

 

13.00 Lunch

Conference hall.

Session 10. HDP processing.

14.00
O2-47
Microwave discharge on external surface of quartz plate. V. M. Shibkov, A. P. Ershov, O. S. Surkont. Moscow State University, Physical Depart., Moscow, Russia.
14.20
O2-48
Comparative study of inductively coupled and microwave BF3 plasmas for microelectronic technology applications. Ya. N. Sukhanov, A. P Ershov, K. V. Rudenko and A. A. Orlikovsky. Institute of Physics and Technology RAS, Moscow, Russia.
14.40
O2-49
Volume and heterogeneous chemistry in Cl2/Ar inductively coupled plasma. A. Efremov 1,2, V. Svettsov 1, C. - I. Kim 2. 1. Ivanovo State University of Chemistry & Technology, Ivanovo, Russia; 2. Chung-Ang University, Seoul, Korea.
15.00
O2-50
Formation of micro-and nanostructures in Si and SiO2 by using plasma etching and deposition processes. I. Amirov, M. Izyumov, O. Morozov, A. Shumilov. Institute of Microelectronics and Informatics, RAS, Yaroslavl, Russia.
15.20
O2-51
Precise speeding shallow trench etch development for power electronics. V. Galperin, V. Zuev. OAO Angstrem, Zelenograd, Russia.

 

Room A. Session 11. Technological processes I.

14.00
O2-52
Investigation of Zirconia Film Growth Using kinetic Monte Carlo (kMC), Molecular Dynamics (MD) and integrated kMC-MD Approaches. A. Knizhnik1, A. Bagatur'yants1, B. Potapkin1 and A. Korkin2. 1.Kinetic Technologies, Moscow, Russia; 2. Semiconductor Products Sector, Motorola Inc., USA
14.20
O2-53
CANCELLED!
14.40
O2-54
AlGaAs-GaAs heterostructure ?-doped field-effect transistor (?-FET). Z. Chakhnakia 1, Z. Hatzopoulos 2, L. Khvedelidze 1, N. Khuchua 1, R. Melkadze 1, G. Peradze 1. 1. Research & Production Complex "(RPC) Electron Technology" of Tbilisi State University, Tbilisi, Georgia; 2. Foundation for Research and Technology - Hellas (FORTH) Institute of Electron Structure & Lasers, Heraklion, Greece.
15.00
O2-55
Ion beam synthesis of cobalt silicides in Si and SiGe. G .G. Gumarov1, V. Yu. Petukhov1, V. A. Shustov1, O. P. Pchelyakov2, V. I. Mashanov2, I. B. Khaibullin1. 1. Kazan Physical-Technical Institute, RAS, Kazan, Russia; 2. Institute of Semiconductor Physics, RAS, Novosibirsk, Russia.
15.20
O2-56
Planarization process of CMOS RAM multilevel interconnection system. V. A. Vasil'ev1, K. A. Vorotilov1, A. S. Valeev2, V. I. Shishko2, V. V. Mishin1, C. P. Volk2, A. S. Sigov1. 1. Moscow State Institute lf Radioengineering, Electronics and Automation, Moscow, Russia; 2. Scientific and Research Institute of Molecular Electronics and Mikron plant, Moscow, Russia.

 

Room B. Session 12. Technological processes II.

14.00
O2-57
Investigation of the dynamics of recrystallization and melting of the surface of implanted silicon at rapid thermal processing. Ya. Fattakhov, M. Galyautdinov, T. L'vova, M. Zakharov, I. Khaibullin. Kazan Physico-Technical Institute, RAS, Kazan, Russia.
14.20
O2-58
The Peculiarities of BF2 Ion Implantation During of Silicon MDS Integration Circuit Formation. A. N. Tarasenkov, N. N. Gerasimenko. Moscow Institute of Electronic Technology (Technical University), Zelenograd, Russia.
14.40
O2-59
Phases transformation in Ti(Ta)-Ni(Co)-Si-N systems. I. Horin1, A. A. Orlikovsky1, A. G. Vasiliev1,2, A. L. Vasiliev3,4. 1. Institute of Physics&Technology (IPT), RAS, Moscow, Russia; 2.Moscow State Institute of Radioengineering, Electronics and Automation (Technical University), Moscow, Russia; 3. Institute of Crystallography, RAS, Moscow, Russia; 4. Department of Metallurgy and Materials Eng., Institute of Materials Science, University of Connecticut, Storrs, USA.
15.00
O2-60
Ultra-low k dielectric for multilevel metallization system. V. V. Mishin, A. S. Sigov, V. A. Vasil'ev, K. A. Vorotilov. Moscow State Institute of Radioengineering, Electronics and Automation, Moscow, Russia.
15.20
O2-61
Development of copper metallization for VLSI using diffusion barrier Ta-W-N layer. A. Klimovitskiy, E. Leonova, A. Mochalov. Moscow State Institute of Radioengineering, Electronics and Automation (Technical University), Moscow, Russia.

 

15.40 Coffee break

16.30 Entresol. Poster Session I

Bottom hall. Exhibition

19.00 Dinner

Thursday, October 9th 2003

08.00 Breakfast

09.00 Conference hall


Plenary session II

09.00
L3-8
INVITED: Developments of Terahertz Wave Generation Technologies. Ken Suto1, Jun-ichi Nishizawa2,3. 1. Department of Materials Science, Tohoku University, Japan; 2. Photodynamics Research Center, Japan; 3. Semiconductor Research Institute, Japan.
09.30
L3-9
INVITED: Electron-phonon interaction in 2D heterostructures. J. Pozela. Semiconductor Physics Institute, Vilnius, Lithuania.
10.00
L3-10
INVITED: Investigation of physical and technological limits for sub-100 nm III-nitride transistors. S. Shapoval. Institute of Microelectronics Technology RAS, Chernogolovka, Russia.

 

10.30 Coffee break

11.00 Conference hall.

Session 13. UHF transistors and IC

11.00
O3-62
Ultra high frequency AlGaN/GaN-transistor with inverted 2DEG Channel. V. G. Mokerov1, L. E. Velikovskii1, M. B. Vvedenskii1, Z. T. Kanametova1, V. E. Kaminskii1, P. V. Sazonov1, D. S. Silin1, J. Graul2, O. Semchinova2. 1. Institute of UHF Semiconductor Electronics of RAS, Moscow, Russia; 2. Laboratories for Informationstechnologie, University Hanover, Germany.
11.20
O3-63
Low temperature technology of semiconductor devices and integrated circuits. A. Bibilashvili, Z. Bokhochadze, A. Gerasimov, R. Kazarov, Z. Kushitashvili, I. Lomidze, T. Ratiani, Z. Samadashvili. Microelectronics chair of Tbilisi State University, Tbilisi, Georgia.
11.40
O3-64
Very-high-speed planar integrated circuit technology based on monolithic integration of RTD and SFET. A. Gorbatsevich1, I. Kazakov2, B. Nalbandov1, S. Shmelev1, A. Tsibizov2. 1. Moscow Institute of Electronic Technology (Technical University), Moscow, Russia; 2. P.N. Lebedev Physical Institute, RAS, Moscow, Russia.
12.00
O3-65
10 GHz 1:2 Switch MMIC for the communication and radar applications. V. G. Mokerov, D. L. Gnatyuk, B. G. Nalbandov, E. N. Ovcharenko, A. P. Lisitskii. Institute of UHF Semiconductor Electronics, RAS, Moscow, Russia.
12.20
O3-66
Multichannel high-speed gallium arsenide integrated circuits for signal processing systems. V. Bespalov, L. Burzina, A. Gorbatsevich, M. Kirillov, B. Nalbandov, S. Schmelev. Scientific and Education Center LPI and MIET on Quantum Devices and Nanotechnologies, Moscow, Russia.
12.40
O3-67
Photoluminescence characterization of resonant-tunneling diodes based on the GaAs/AlGaAs long-period superlattices in process of fabrication. A. A. Belov , A. L. Karuzskii , I. P. Kazakov , Yu. A. Mityagin , V. N. Murzin , A. V. Perestoronin, A. A. Pishchulin , S. S. Shmelev. P.N.Lebedev Physical Institute of RAS, Moscow, Russia.

 

13.00 Lunch

14.00 Conference hall.

Session 14. Nanostructures physics

14.20
O3-68
Pulsed laser deposition of ZnO thin films. Zherikhin A. N., Khudobenko A. I., Panchenko V. Ya.
14.40
O3-69
Non-universal scaling in the integral quantum Hall regime in two-dimensional electon gas in InGaAs/InP heterostructures. B. Podor1,2, Gy. Kovacs3, G. Remenyi4, I. G. Savel`ev5. 1. Research Institute for Technical Physics and Materials Science, HAS, Budapest, Hungary; 2. Budapest Polytechnic, Kando Kalman Faculty of Electrical Engineering, Institute of Microelectronics and Technology, Budapest, Hungary; 3. Department of General Physics, Eotvos Lorand University, Budapest, Hungary; 4. CNRS Center de Recherches sur les Tres Basses Temperatures et Laboratoire des Champs Magnetiques Intenses, Grenoble, France; 5. A.F.Ioffe Physical Technical Institute, RAS, St.Peterburg, Russia.
15.00
O3-70
Ballistic transport in quantum interference devices. A. A. Gorbatsevich1, V. V. Kapaev2. 1. Moscow Institute of Electronic Technology (Technical University), Moscow, Russia; 2. P.N. Lebedev Physical Institute, RAS, Moscow, Russia.
15.20
O3-71
New peculiarities of interband tunneling in broken-gap heterostructures. A. Zakharova1, S. T. Yen2, K. A. Chao3. 1. Institute of Physics and Technology RAS, Moscow, Russia; 2. Department of Electronics Engineering, National Chiao Tung University, Hsinchu, Taiwan, Republic of China; 3. Department of Physics, Lund University, Sweden.
15.40
O3-72
Structural, photoluminescence and electrophysical properties of the porous multilayer InGaAs/GaAs heterostructures. L. K. Orlov1, N. L. Ivina1, N. A. Alyabina1, N. V. Vostokov2, R. A. Rubtsova1. 1. State Lobachevsky University; 2. Institute for Physics of Microstructures, RAS, Nizhny Novgorod, Russia.

 

Room A. Session 15. MEMS and Sensors

14.20
O3-73
Integrated sensor of current. V. Amelichev1, A. Galushkov1, S. Polomoshnov2, Iu. Chaplygin2 . 1. State Research Center Scientific and Manufacturing Coplex of the RF "Technological Center" at MIET, Moscow-Zelenograd, Russia; 2. Moscow State Institute of Electronic Technology Moscow-Zelenograd, Russia.
14.40
O3-74
Linear electrostatic micromotors for nano- and micro-positioning. I. L. Baginsky and E. G. Kostsov. Institute of Automation and Electrometry, RAS, Novosibirsk, Russia.
15.00
O3-75
Constructive-technological methods of self-forming - the base for fabrication of operating and sensitive elements for integrated microsystems. A. I. Galushkov, A. N. Saourov. SMC "Technological Center" MIEE, Moscow, Russia.
15.20
O3-76
3D micromachined gyroscope. I. Lysenko, B. Konoplev. Taganrog State Universitu of Radio-Engineering, Taganrog, Russia.
15.40
O3-77
Bolometric matrix multiplexer. V. Minaev1, E. Volodin, V. Zyubin, V. Chesnokov, I. Mikhalev, E. Muryleva, Yu. Fortinsky, Yu. Tschetverov. 1. JSC "Angstrem-M", Moscow, Russia; 2. JSC "Angstrem-M", Moscow, Russia; 3. JSC "ITTP IP", Moscow, Russia.

 

Room B. Session 16. Quantum Informatics.

14.20
O3-78
Models of ensemble NMR quantum cellular automata based on artificial and natural electronic antiferromagnets. A. A. Kokin. Institute of Physics and Technology of RAS, Moscow, Russia.
14.40
O3-79
Quantum key distribution on polarized single photons. V. L. Kurochkin, I. I. Ryabtsev, I. G. Neizvestny. Institute of Semiconductor Physics, RAS, Novosibirsk, Russia.
15.00
O3-80
Anomalous Transport in Sisyphus Cooling Optical Lattice Scheme and Levy Distributions. M. P. Kondrashin, V. P. Yakovlev. Moscow State Engineering Physics Institute (state university), Russia.
15.20
O3-81
Negative-U properties for a quantum dot. N. T. Bagraev1, A. D. Bouravleuv1, L. E. Klyachkin1, A. M. Malyarenko1, I. A. Shelykh2. 1. A.F.Ioffe Physico-Technical Institute, St.Peterburg, Russia; 2. St. Peterburg State Technical University, St.Peterburg, Russia.
15.40
O3-82
Dynamics of entangled states of nuclear spins in solids. S. I. Doronin. Institute of Problems of Chemical Physics, RAS, Chernogolovka, Russia.
16.00
O3-83
Noise-resistant quantum key distribution protocol. D. V. Sych, B. A. Grishanin, and V. N. Zadkov. International Laser Center and Department of Physics M. V. Lomonosov Moscow State University, Moscow, Russia.

 

16.20 Coffee break

16.30 Entresol. Poster session II

Bottom hall. Exhibition

19.30 Banquet


Friday, October 10th, 2003

09.00 Breakfast

10.00 Departure

 

POSTERS

October 8th. 2003

Poster session I
Entresol

P 1-1
Structure Peculiarities of Metallic Films Produced by Selective Removal of Atoms. B. Gurovich, A. Domantovsky, K. Maslakov, E. Olshansky, K. Prikhodko. Russian Research Center "Kurchatov Institute", Moscow, Russia.
P1-2
Electrical Properties of Metal Films Prepared by Selective Removal of Atoms. B. Gurovich1, K. Prikhodko1, A. Domantovsky1, D. Dolgy1, E. Ol'shansky1, B. Aronzon1, Y. Lunin2. 1. Russian Research Center "Kurchatov Institute", Moscow, Russia; 2. Institute for System Studies, RAS, Moscow, Russia.
P 1-3
Increasing of electric strength in the pseudospark gap with a high pulse repetition rate. Yu. D. Korolev, O. B. Frants, V. G. Geyman, R. V. Ivashov, N. V. Landl, I. A. Shemyakin. Institute of High Current Electronics, Tomsk, Russia.
P1-4
Heat - resistant light-sensitive polymer compositions based on poly(o - hydroxyamides) - heat-resistant photolacks. L. Rudaya1, N. Klimova1, T. Yourre1, G Lebedeva2, I. Sokolova3. 1. St. Petersburg State Technological Institute (Technical University), St. Petersburg, Russia; 2. Institute of Macromolecular Compounds, RAS, St. Petersburg, Russia; 3. St. Petersburg State Electr technical University (LETI), St. Petersburg, Russia.
P 1-5

Pre-exposure thermal treatment of photoresist layers under elevated pressure as applied to lithographic technologies of photomask and integrated microcircuit manufacture. V. A. Peremyshchev1, V. V. Martynov2. 1.Technology. Equipment. Materials company, Moscow, Russia; 2. Submicro Research and Development Association, Zelenograd, Russia.

P1-6
Discharge pumped table-top EUV laser on dense plasma of multi charged ions. V. Burtsev, E. Bol'shakov, V. Chernobrovin, N. Kalinin. Efremov Scientific Research Institute of Electrophysical Apparatus, St. Petersburg, Russia.
P1-7
Automatical Optimization of Pupil Filters for High-Resolution Photolithography. M. Machin, M. Gitlin, N. Savinskii. Institute for Microelectronics and Informatics of RAS.
P1-8
Self-align technology for nanotransistors channel forming. K. Valiev, A. Krivospitsky, A. Okshin, A. Orlikovsky, Yu. Semin. Institute of of Physics and Technology, RAS, Moscow, Russia
P1-9
The effect of imaging forces in ultra thin gate insulator on the tunneling current and its oscillations at the region of transition from the direct tunneling to the Fowler-Nordheim tunneling. E. I. Goldman, N. F. Kukharskaya, G. V. Chucheva and A. G. Zhdan. The Institute of Radio Engineering and Electronics, RAS.
P 1-10
Initiated tunnel current through thin gate oxide generation minority carriers in Si-MOS-structures. G. V. Chucheva1, A. S. Dudnikov2, E. I. Goldman1, N. A. Zaitsev2, A. G. Zhdan1. 1. The Institute of Radio Engineering and Electronics, RAS; 2. JSC "Mikron Corporation".
P1-11
Investigation of the leakage currents in SOI MOSFET with the nanoscale channel length. A. A. Frantsusov, N. I. Bojarkina, M. A. Ilnitsky, V. P. Popov, L. N. Safronov. Institute of Semiconductor Physics, RAS, Novosibirsk, Russia.
P 1-12
Gamma radiation tolerance of 0.5 m SOI MOSFETs. O. V. Naumova, A. A. Frantsuzov, V. P. Popov. Institute of Semiconductor Physics, Siberian Branch of RAS, Novosibirsk, Russia.
P1-13
The application of Thomas-Fermi equation for the modelling of an intra-atomic potential in the ultrathin gate dielectric. G. Krasnikov, A. Eremenko, N. Zaitsev, I. Matyushkin. Research and Development Institute for Molecular Electronics and Plant MICRON, Moscow, Zelenograd, Russia.
P 1-14
Optical and photoelectrical characterization of as-deposited and annealed PECVD polysilicon thin film. A. V. Khomich1, V. I. Kovalev1, A. S. Vedeneev1, A. G. Kazanskyi2, P. A. Forsh D. He2, X. Q. Wang3, H. Mell4. 1. Institute of Radiotechnics and Electronics, RAS, Fryazino, Russia; 2. M.V. Lomonosov Moscow State University, Department of Physics, Moscow, Russia; 3. Lanzhou University, Department of Physics School of Physical and Technology, Lanzhou, China; 4. Philipps-Universitat Marburg, Fachdereich Physik, Marburg, Germany.
P1-15
Polycrystalline silicon for semiconductor devices. D. Milovzorov. Institute of Physics and Technology, RAS, Moscow, Russia.
P 1-16
Ion synthesis of silicate glasses: simulation, process engineering and applied aspects. S. Krivelevich, E. Buchin, Yu. Denisenko, A. Tsyrulev. Institute of Microelectronics and Informatics, RAS, Yaroslavl, Russia.
P1-17
Investigation of energy levels in Si subjected high-temperature diffusion annealing in Zn atmosphere. Kornilov B.V., Privezentsev V. V. Institute of Physics and Technology, RAS, Moscow, Russia.
P1-18
Influence of cells-MOSFETs with Schottky barrier drain contact location in power IC on electrical device characteristics. M. Korolev1, A. Krasukov1, R. Tihonov2. 1. Moscow State Institute of Electronics Engineering; 2. Scientific Manufacturing Center "Technological Center", Moscow, MSIEE
P1-19
Functional Diagnostics of the Metal Diffusion in Silicon. A. E. Berdnikov, V. N. Gusev, A. A. Popov, V. I. Rudakov, V. D. Chernomordik. Institute of Microelectronics and Informatics RAS, Yaroslavl, Russia.
P1-20
Development of the scanning spreading resistance microscopy for nanoscale structure properties investigation. V. Shevyakov1, S. Lemeshko2, A. Tihomirov1. 1. Moscow Institute of Electronic Engineering, Zelenograd, Moscow, Russia; 2. Molecular Devices and tools for nanotechology Co., Zelenograd, Moscow.
P1-21
Application of piezoelectric monocrystals in devices of exact positioning of probe microscopes. V. Antipov, M. Malinkovich, Yu. Parkhomenko. Moscow Steel and Alloys Institute, Russia.
P1-22
Low-Frequency Noise in Disordered Silicon Systems. M. I. Makoviychuk1, E. O. Parshin1, A. L. Chapkevich2. 1. Institute of Microelectronics & Informatics, RAS, Yaroslavl, Russia; 2. Moscow Committee of Science and Technologies, Moscow, Russia.
P1-23
Characterization of nanocrystals in porous germanium layer by X-RAY diffraction. A. Lomov1, V. Bushuev2, V. Karavanskii 3. 1. A.V. Shubnikov Institute of Crystallography, RAS, Moscow, Russia; 2. M.V. Lomonosov Moscow State University, Moscow, Russia; 3. Institute of Natural Sciences Center of General Physics Institute, RAS, Moscow.
P1-24
Advanced capabilities of binary modulation polarization ellipsometry. V. I. Kovalev, A. I. Rukovishnikov, A. V. Khomich. Institute of Radiotechnics and Electronics, RAS, Fryazino, Russia.
P1-25
Nonlinear-optical microscopy for polarization switching in thin ferroelectric films. E. Mishina1, N. Sherstyuk1, K. Vorotilov1, A. Sigov1, Th. Rasing2, V. M. Mukhortov3. 1. Moscow State Institute of Radioengineering, Electronics and Automation, Russia; 2. University of Nijmegen, The Netherlands; 3. Institute of General Physics, RAS, Moscow, Russia.
P1-26
PMMA and polystyrene films modification under ion implantation studied by spectroscopic ellipsometry. A. V. Leontyev1, V. I. Kovalev2, A. V. Khomich2, F. F. Komarov1. 1. Belorussian State University, Minsk, Belarus; 2. Institute of Radiotechnics and Electronics, RAS, Fryazino, Russia.
P1-27
Ellipsometric investigation of buried layers in ion-implanted and annealed silicon and diamond structures. V. I. Kovalev1, A. V. Khomich1, A. I. Rukovishnikov1, R. A. Kmelnitskyi2, E. V. Zavedeev3. 1. Institute of Radiotechnics and Electronics, RAS, Fryazino, Russia; 2. Lebedev Physical Institute, RAS, Moscow, Russia; 3. General Physics Institute, RAS, Moscow, Russia.
P1-28
Computer Simulation Application for Improving Correctness of Data Obtained by Magnetic Force Microscope. D. Ovchinnikov, A. Bukharaev. Zavoisky Physical Technical Institute of RAS, Kazan, Russia.
P1-29
Investigation of dissolution process of implanted silicon dioxide. N. Nurgazizov, A. Bukharaev. Zavoisky Physical Technical Institute of RAS, Kazan, Russia.
P1-30
Wave-ordered structure on silicon surface and its modification by wet and dry etching. D. S. Kibalov, I. V. Zhuravlev, P. A. Lepshin, G. F. Smirnova, I. I. Amirov, V. K. Smirnov. Institute of Microelectronics and Informatics, RAS, Yaroslavl, Russia.
P1-31
Simulation of a ballistic field effect nanotransistors. A. A. Sidorov, V. V. V'yurkov, and A. A. Orlikovsky. Institute of Physics and Technology RAS, Moscow
P1-32
Bi films for the fabrication of nanowires by the probe lithography. A. Chernykh, A. Il'in, O. Kononenko, G. Mikhailov. Institute of Microelectronics Technology & High Purity Materials, RAS, Chernogolovka, Moscow.
P1-33
Current transport and photoelectric properties of silicon nanocomposite - porous SiC. V. I. Sokolov1, M. V. Zamoryanskya1, L. V. Grigoryev2, V. A. Berbetc2, V. E. Ter-Nersysiants2. 1. Ioffe Physicotechnical Institute, St. Peterburg, Russia; 2. St.Petersburg University, Physical Research Institute Russia.
P1-34
The research system for experiments on studying the gas medium influence on the electroforming process. V. Levin, V. Mordvintsev. Institute of Microelectronics and Informatics, Russian Academy of Sciences, Yaroslavl, Russia.
P1-35
Current transport in thermooxidized silicon nanocomposite. V. I. Sokolov, M. V. Zamoryanskya, L. V. Grigoryev, V. A. Berbetc, V. E. Ter-Nersysiants 1. Ioffe Physicotechnical Institute, St.Petersbyrg, Russia; 2. St.Petersburg University, Physical Research Institute.
P1-36
An Investigation into Nano-Sized Fractal Film Structures. I. Serov 1, G. Lukyanov2, V. Margolin 1 , N. Potsar 3 , I. Soltovskaya 1 , V. Fantikov 3. 1. Aires New Medial Technologies Foundation, St. Petersburg, Russia; 2. St. Petersburg State Institute of Fine Mechanics and Optics (Technical University); 3. St. Petersburg State Electrotechnical University (LETI), St. Petersburg, Russia.
P1-37
The features of electroforming in open sandwich structures Si-SiO2-W for silicon of different types of conductivity. V. Mordvintsev, S. Kudryavtsev, V. Levin. Institute of Microelectronics and Informatics, Russian Academy of Sciences, Yaroslavl, Russia.
P1-38
Influence of electrostatic interaction between a conducting cantilever and a metal film on the local anodic oxidation. A. N. Bulatov, V. K. Nevolin. Moscow State Institute of Electrical Engineering, Zelenograd, Moscow, Russia.
P1-39
Electron Beam Induced Deposition of Iron Carbon Nanostructures from Iron Dodecacarbonyl Vapour. M. A. Bruk1, E. N. Zhikharev2, E. I. Grigoriev1, A. V. Spirin1, V. A. Kalnov2, I. E. Kardash1. 1. Kaprov Institute of Physical Chemistry, Moscow, Russia; 2. Physics & Technology Institute of Russian Academy of Science, Moscow, Russia.
P1-40
PZT nanostructures templated into porous alumina membranes. V. A. Vasil'ev 1 , E. D. Mishina 1 , K. A. Vorotilov 1 , A. S. Sigov 1 , O. Zhigalina 2 , N. M. Kotova 3. 1. Moscow State Institute of Radioengineering, Electronics and Automation, Moscow, Russia; 2. Institute of Crystallography, Russian Academy of Sciences, Moscow, Russia; 3 Institute of Physical Chemistry, Moscow, Russia.
P1-41
Diffusive and ballistic regime for transfer resistances. V. Yu. Vinnichenko, A. V. Chernykh and G. M. Mikhailov. Institute of the Microelectronic Technology and High Pure materials RAS , 142432 , Chernogolovka , Moscow Region , Russia.
P1-42
The investigations of ferroelectric thin films in virtual measuring system. E. Pevtsov, A. Sigov, A. Pyzhova, A. Gorelov. Moscow State Institute of Radioengineering, Electronics & Automation (Technical University), Russia
P1-43
MFM study and computer simulation of domain structures in permalloy elements. A. G. Temiryazev. Institute of Radioengineering & Electronics RAS, Fryazino, Russia.
P1-44
Fast ferroelectric domain switching probed by second harmonic generation. E. D. Mishina 1 , N. E. Sherstyuk 1 , A. S. Sigov 1 , A. V. Mishina 2 , V. M. Mukhortov3 , Th. Rasing 4. 1. Moscow State Institute of Radioengineering, Electronics and Automation, Moscow, Russia; 2. Tver State Technical University, Tver, Russia; 3. Institute of General Physics, Russian Academy of Science, Moscow, Russia, 4. University of Nijmegen, The Netherlands.
P1-45
Ferroelectric nanostructures sputtered on alumina membranes. E. D. Mishina 1, V. I. Stadnichuk 1, A. S. Sigov 1, Yu. I. Golovko 2, V. M. Mukhorotov 2, Th. Rasing 3. 1. Moscow State Institute of Radioengineering, Electronics and Automation, Moscow; 2. Institute of General Physics, Russian Academy of Science, Moscow, Russia. 3. University of Nijmegen, The Netherlands.
P1-46
FMR investigation of permalloy array structures. Yu. A. Filimonov1, S. A. Nikitov2, A. V. Butko3, A. V. Kozhevnikov1, A. A. Veselov1, S. L. Vysotsky. 1. Institute of Radioengineering & Electronics, RAS, Saratov Department, Saratov, Russia; 2. Institute of Radioengineering& Electronics, RAS, Moscow, Russia.
P1-47
Magnetic properties of DC magnetron sputtered thin nickel films. A. S. Dzhumaliev, Yu. A. Filimonov, S. N. Vasiltchenko, A. V. Kozhevnikov, S. L. Vysotsky. Institute of Radioengineering & Electronics, RAS, Saratov Department, Saratov, Russia
P1-48
Influence of growth temperature on the easy magnetization axis switch and domain structure in Fe/GaAs(100) structures. Yu. Filimonov, A. Dzhumaliev, A. Kozhevnikov, S. Vysotsky. Institute of Radioengineering & Electronics, RAS, Saratov Department, Saratov, Russia.
P1-49
Tomographic reconstruction of space plasma inhomogeneities in wide aperture plasma technology equipment under strong restriction on the points of view. K. V. Rudenko, A. V. Fadeev, A. A. Orlikovsky, and K. A. Valiev. Institute of Physics and Technology RAS, Moscow, Russia.
P1-50
Etching mechanism of Au thin films in Cl2/Ar inductively coupled plasma. A. Efremov 1,2, V. Svettsov 1, C. - I. Kim 2. 1. Ivanovo State University of Chemistry & Technology, Ivanovo, Russia; 2. Chung-Ang University, Seoul, Korea.
P1-51
Investigation of influence of low energy ion beam parameters on process of Reactive Ion Beam Synthesis (RIBS) of thin films. Y. P. Maishev, S. L. Shevchuk. Institute of Physics and Technology RAS, Moscow, Russia.
P1-52
Application RIE system in precise piezoelectric quartz resonators and filters manufacture. V. Galperin, V. Zuev. OAO Angstrem, Zelenograd, Russia.
P1-53
Simulation of technological process by etching of microstructures in high-voltage gas discharge plasma. N. Kazanskiy, V. Kolpakov. Image Processing Systems Institute, RAS, Samara, Russia
P1-54
The equation of a two-dimensional island growth on the incommensurable monocrystalline substrate. Yu. N. Devyatko, S. V. Rogozhkin, A. V. Fadeev. Moscow engineering-physical institute (state university), Moscow, Russia.
P1-55
The mathematical modeling of the polymerization processes during the high-temperature oxidation of silicon. G. Krasnikov, A. Eremenko, N. Zaitsev, I. Matyushkin. Research and Development Institute for Molecular Electronics and Plant MICRON Moscow, Zelenograd, Russia.
P1-56
Defects in YSZ films induced by electric breakdowns during magnetron deposition on Si substrate. V. G. Beshenkov, V. A. Marchenko, A. G. Znamenskii. Institute of Microelectronics Technology, Russian Academy of Sciences, Chernogolovka, Russia.
P1-57
Application of modified moments method for kinetics description of nano-, micro -particles formation in gas phase. A. Durov, M. Deminsky, M. Strelkova, B. Potapkin. RRC "Kurchatov Institute", 123182, Kurchatov sq. 1, Moscow, Russia.
P1-58
First principle calculations of interactions of ZrCl4 precursors with bare and hydroxylated ZrO2 surface. I. M. Iskandarova 1, A. A. Knizhnik 1, E. A. Rykova 1, A. A. Bagatur'yants 1, B. V. Potapkin 1, A. A. Korkin 2. 1. Kinetic Technologies Ltd., Moscow, Russia; 2. Semiconductor Products Sector, Motorola Inc., Mesa, USA.
P1-59
Vanadium reactive magnetron sputtering in mixed Ar/O2 discharges. V. A. Marchenko. Institute of Microelectronics Technology, Russian Academy of Sciences, Chernogolovka, Russia.
P1-60
Some properties of titanium nitride films deposited by reactive magnetron sputtering. V. Bochkaryov, S. Kudryavtsev, V. Mordvintsev, N. Timina, L. Tsvetkova. Institute of Microelectronics and Informatics, Russian Academy of Sciences, Yaroslavl, Russia.
P1-61
Structural Transition in Amorphous Silicon Deposited by Low Frequency Discharge. A. A. Popov1, A. E. Berdnikov1, V. D. Chernomordik1, Yu. A. Munakov1, M. D. Efremov2, V. A. Volodin2. 1. Institute of Microelectronics and Informatics RAS, Yaroslal, Russia; 2. Institute of Semiconductors Physics, Siberian Branch of RAS, Novosibirsk, Russia.
P1-62
Nb epitaxy at the time of low-energy ion bombardment conditions. V. V. Naumov, V. F. Bochkarev, A. A. Goryachev, A. S. Kunitsyn, E. I. Ilyashenko, P. E. Goa, T. H. Iohansen. 1. Institute of Microelectronics and Computer Science, RAS, Yaroslavl, Russia; 2. University of. Oslo, Norway.
P1-63
Contact systems for sub-100 nm CMOS technology. I. A. Horin 1, A. A. Orlikovsky1, A. G. Vasiliev 1,2, A. L. Vasiliev 3,4. 1. Institute of Physics & Technology (IPT), Russian Academy of Sciences, Moscow, Russia; 2. Moscow State Institute of Radioengineering, Electronics and Automation (Technical University), Moscow, Russia; 3. Institute of Crystallography, Russian Academy of Sciences, Moscow, Russia; 4. Department of Metallurgy and Materials Eng., Institute of Materials Science, Unit 3136, University of Connecticut, Storrs, USA.
P1-64
The polyimides photoresist for multilevel- interconnect VLSI technology. N. Savinski. Laboratory of Molecular Electronics, Institute of Microelectronics and Informatics of RAS, Yaroslavl, Russia.
P1-65
Epitaxial erbium silicide contact to silicon-germanium. Zs. J. Horvath 1, G. Molnar1, G. Peto 1, I. Dezsi 2, R. Loo 3, M. Caymax 3, K. Z'd'ansky 4. 1. Hungarian Academy of Sciences, Research Institute for Technical Physics and Materials Science, Budapest 114, Hungary; 2. KFKI Research Institute for Particle and Nuclear Physics of the Hungarian Academy of Sciences, Budapest 114, Hungary; 3. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium; 4. Institute of Radio Engineering and Electronics, Academy of Sciences of the Czech Republic, Chaberska 57, Prague 8, 18251, Czech Republic.
P1-66
Electrical behaviour of Al/Si and Al/SiGe junctions: Effect of surface treatment. Zs. J. Horvath 1, L. K. Orlov 2, M. Adam 1, A. V. Potapov 2, I. Szabo 1, V. A. Tolomasov 2, B. Cvikl 3, Yu. M. Ivanov 4, D. Korosak 3, E. Pashaev 4. 1. Hungarian Academy of Sciences, Research Institute for Technical Physics and Materials Science, Budapest, Hungary; 2. Institute for Physics of Microstructures, RAS, Nizhny Novgorod, Russia; 3. Faculty of Civil Engineering, University of Maribor, Maribor, Slovenia, and J. Stefan Institute,Ljubljana, Slovenia; 4. Institute of Crystallograhpy, RAS, Moscow, Russia.
P1-67
Modeling diffusion of ion implanted impurity in crystalline silicon under a temperature gradient. V. Rudakov, V. Ovcharov, A. Bashmakov. Institute of Microelectronics and Informatics, Russian Academy of Sciences, Yaroslavl, Russia.
P1-68
Modeling of Phosphorous Diffusion in Ion-Implanted Si in Condition of Dopant Transient Enhanced Out-Diffusion at Vacuum Rapid Thermal Annealing. V. Kagadei 1, A. Markov 2, D. Proskurovsky 2. 1. Research Institute of Semiconductor Devices, Tomsk, Russia; 2. Institute of High Current Electronics, Tomsk, Russia.
P1-69
Precision studies of semiconductor superlattices by X-Ray diagnostic methods. E. Pashaev 1, S. Yakunin 1, A. Zaitsev 2. 1. Institute of Crystallography, Russian Academy of Sciences, Moscow, Russia; 2. Moscow Institute of Radio Engineering and Automatics, Moscow, Russia.
P1-70
Determining the surface electrostatic potential ?s of a dielectric bordering semiconductor using the method of ? 's (?s)-diagrams. G. V. Chucheva, N. F. Kukharskaya, A. G. Zhdan. The Institute of Radio Engineering and Electronics, RAS, Moscow, Russia.

 

October 9th. 2003

Poster session II
Entresol

P2-71
Fabrication of 3D photonics structures. S. Zaitsev, M. Knyazev, S. Dubonos. Institute of Microelectronics Technology, RAS, Chernogolovka, Russia.
P2-72
Quality of silicon macropores produced by deep anodic etching (DAE) depending on silicon wafer resistivity and parameters of the DAE procedure. V. V. Starkov, E. Yu. Gavrilin, A. F. Vyatkin, S. V. Dubonos, and M. A. Knyasev. Institute of Microelectronics Technology, RAS, Moscow district, Chernogolovka, Russia.
P2-73
Investigation of a nucleation stage of macropore formation in p-type silicon. V. V. Starkov, E. Yu. Gavrilin, A. F. Vyatkin. Institute of Microelectronics Technology, Russian Academy of Sciences, Moscow district, Chernogolovka, Russia.
P2-74
Transition from quasi-hexagonal to quasi-one dimensional pores distribution during deep anodic etching of uniaxial stressed silicon plate. V. V. Starkov1, E. Yu. Gavrilin1, A. F. Vyatkin1, V. I. Emel'yanov2, and K. I. Eremin2. 1. Institute of Microelectronics Technology, RAS, Moscow - Chernogolovka, Russia, 2. International Laser Center, Lomonosov Moscow State University, Moscow, Russia
P2-75
Porous anodic alumina for photonics and optoelectronics. S. Gavrilov 1, D. Kravtchenko 1, A. Zheleznyakova 1, V. Timoshenko 2, P. Kashkarov 2, V. Melnikov2, G. Zaitsev 2, L. Golovan 2. 1. Moscow Institute of Electronic Technology, Moscow, Russia; 2. Physics Department, M.V. Lomonosov Moscow State University, Moscow, Russia.
P2-76
Study on interaction of organic luminophors with the modified porous alumina. G. Gorokh 1, A. Kukhta 2, Yu. Koshin 1, D. Solovei 1, A. Poznyak 1, A. Mozalev. 1. Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus; 2. Institute of Molecular and Atomic Physics, Minsk, Belarus.
P2-77
Design and manufacturing of passive - matrix for organic light-emitting micro display. M. Gitlin, N. Savinski, K. Truhanov, M. Kachalov, E. Savinskaya. Laboratory of Molecular Electronics, Institute of Microelectronics and Informatics of RAS, Yaroslavl, Russia.
P2-78
The strain distribution in Si lattice of the layer containing -FeSi2 precipitates. A. Borun, N. Khmelnitskaja, Yu. Parkhomenko, E. Vygovskaja. The Moscow institute of steel and alloys, Moscow, Russia.
P2-79
Residual Photoresist Removal from Si and GaAs Surface by Atomic Hydrogen Flow Treatment. E. Anischenko 1, V. Diamant 2, V. Kagadei 1, E. Nefeyodtsev 3, K. Oskomov 3, D. Proskurovsky 3, S. Romanenko 3. 1. Research Institute of Semiconductor Devices, Tomsk, Russia; 2. Atomic Hydrogen Technologies, Katzrin, Israel; 3. Institute of High Current Electronics, Tomsk, Russia.
P2-80
Structural characterization of undoped and Si-doped AlGaAs/GaAs double quantum wells separated by a thin AlAs layer. A. Lomov 1, M. Chuev 2, G. Galiev 3, E. Klimov 3, A. Cherechukin 3. 1. A.V. Shubnikov Institute of Crystallography, RAS, Moscow, Russia; 2. Institute of Physics & Technology of RAS, Moscow, Russia; 3. Institute of UHF Semiconductor Electronics of RAS, Moscow, Russia.
P2-81
CANCELLED!
P2-82
Formation of multilayer Co/Cu and Ni/Cu structures by magnetron sputtering and electron-beam evaporation. I. A. Horin1, V.F. Meshcheryakov2, A. A. Orlikovsky1, K. V. Timonin3, A. G. Vasiliev1,2. 1. Institute of Physics & Technology (IPT), RAS, Moscow, Russia; 2. Moscow State Institute of Radioengineering, Electronics and Automation (Technical University), Moscow, Russia; 3. Institute of Crystallography, RAS, Moscow, Russia.
P2-83
Tilted-axes YBCO thin films: from vicinal range to step bunching. P. B. Mozhaev 1,2, J. E. Mozhaeva 1,2, C. S. Jacobsen2, J. B. Hansen2, I. K. Bdikin3, T. Donchev4, E. Mateev4, T. Nurgaliev4, S. A. Zhgoon5, A. E. Barinov5. 1. Institute of Physics and Technology, RAS, Moscow, Russia, 2. Technical University of Denmark, Physics Dept., Lyngby, Denmark,3. Dept. of Ceramic and Glass Engineering, CICECO, University of Aveiro, Aveiro, Portugal 4. Institute of Electronics Bulgarian Academy of Sciences, Sofia, Bulgaria 5. Moscow Power Engineering Institute, Moscow, Russia
P2-84
Photoluminescence spectroscopy of quantum well GaAs/InGaAs/GaAs in electrical field. Yu. V. Khabarov, L. E. Velikovsky. Institute of UHF Semiconductor Electronics, Russian Academy of Sciences, Moscow, Russia.
P2-85
Submicron probes for Hall magnetometry over the extended temperature range from helium to room temperatures. S. V. Morozov 1, S. V. Dubonos 1, K. S. Novoselov1,2, A. K. Geim 2. 1. Institute of Microelectronics Technology and High Purity Material, RAS, Chernogolovka, Russia; 2. University of Manchester, Manchester, UK.
P2-86
Argon-oxygen ion-plasma treatment modifies photoluminescence spectrum of porous silicon. B. M. Kostishko, S. J. Salomatin. Ul'yanovsk State University, Ul'yanovsk, Russia.
P2-87
Method of electrophysical parameters determination in semiconductors by means of microstripe resonator. V. V. Sidorin, A. V. Sidorin. Moscow State Institute of Radioenginiriing, Electronics and Automation (Technical University) MIREA, Moscow, Russia.
P2-88
Modeling Atomic Hydrogen Diffusion in GaAs. V. Kagadei 1, E. Nefyodtsev 2. 1. Research Institute of Semiconductor Devices, Tomsk, Russia; 2. Institute of High Current Electronics, Tomsk, Russia.
P2-89
Dry Cleaning of Fluorocarbon Residues by Atomic Hydrogen Flow. E. Anischenko 1, V. Diamant 2, V. Kagadei 1, E. Nefyodtsev 3, D. Proskurovsky 3, S. Romanenko 3. 1. Research Institute of Semiconductor Devices, Tomsk, Russia; 2. Atomic Hydrogen Technologies, Katzrin, Israel; 3. Institute of High Current Electronics, Tomsk, Russia.
P2-90
Application of Atomic Hydrogen Treatment in Si and GaAs Based Devices Technology. V. Kagadei 1, E. Nefyodtsev 2, D. Proskurovsky 2, S. Romanenko 2. 1. Research Institute of Semiconductor Devices, Tomsk, Russia; 2. Institute of High Current Electronics, Tomsk, Russia.
P2-91
F+, B+ ion implantation into GaAs multilayer heterostructures. M. Tigishvili, N. Gapishvili, R. Melkadze, M. Ksaverieva, T. Khelashvili. Research & Production Complex (RPC) " Electron Technology" of Tbilisi State University, Tbilisi Georgia.
P2-92
DD-PHEMT structures and technology on GaAs for power amplification in up to millimeter wave range. V. G. Mokerov 1, A. S. Bugayev 1, Yu. V. Fedorov 1, M. Yu. Scherbakova 1, A. P. Senichkin 1, A. T. Grigoriev 1, E. N. Enyushkina 1, L. E. Velikovskii 1, G. Z. Garber 2, A. M. Zubkov 2, Yu. A. Matveyev 2. 1. Institute of Ultra High Frequency Semiconductor Electronics of RAS (IUHFSE RAS), Moscow, Russia; 2. Science Research Institute "Pulsar", Moscow, Russia
P2-93
InAlAs/InGaAs isomorphic HEMT's with cut off frequency ft>100GHz for mm-wave applications. V. G. Mokerov, Yu. V. Fedorov, A. S. Bugaev, M. Yu. Scherbakova, A. T. Grigoriev, E. N. Enyushkina. 1. Institute of Ultra High Frequency Semiconductor Electronics of RAS (IUHFSE RAS) Moscow,Russia.
P2-94

Structure Peculiarities of Metallic Films Produced by Selective Removal of Atoms. B. Gurovich, A. Domantovsky, K. Maslakov, E. Olshansky, K. Prikhodko. Russian Research Center "Kurchatov Institute", Moscow, Russia.

P2-95
Logic gates based on resonant-tunneling diodes. A. Gorbatsevich 1, I. Kazakov 2, M. Kirillov 1, B. Nalbandov 1, S. Schmelev 1, A. Tsibizov 2. 1. Moscow Institute of Electronic Technology (Technical University), Moscow, Russia; 2. P.N. Lebedev Physical Institute, RAS, Moscow, Russia.
P2-96
CANCELLED!
P2-97
Liquid phase epitaxial growth and optical properties of InxGa1-xAsySb1-y on GaSb B. Podor, V. Rakovics, J. Balazs, A. L. Toth. Hungarian Academy of Sciences, Research Institute for Technical Physics and Materials Science, Budapest, Hungary.
P2-98
Design of P-HEMT-MMIC chipset for X-band active phased array radar. V. G. Mokerov, B. G. Nalbandov, E. N. Ovcharenko, T. I. Kuznetzova, D. L. Gnatyuk, A. S. Bugaev, Yu. V. Fedorov. Institute of UHF Semiconductor Electronics of RAS, Moscow, Russia.
P2-99
Au electrical contacts to GaSb based epitaxial structures. Zs. J. Horvath, V. Rakovics, B. Podor. Hungarian Academy of Sciences, Research Institute for Technical Physics and Materials Science, Budapest 114, Hungary.

P2-100
The process of low-temperature diffusion in production of the semiconductor devices. A. Bibilashvili, Z. Bokhochadze, A. Gerasimov, N. Gochaleishvili, R. Kazarov, I. Lomidze, E. Maziashvili, S. Sikharulidze. Microelectronics chair of Tbilisi State University, Tbilisi, Georgia.
P2-101
Elaboration of gallium arsenide technology in Georgia for development of microelectronic devices. N. Khuchua 1, Z. Chakhnakia 1, L. Khvedelidze 1, R. Melkadze 1, A. Tutunjan 1, R. Diehl 2. 1. Research and Production Complex (RPC) "Electron Technology" of I.Javakhishvili Tbilisi State University, Tbilisi, Georgia; 2. III-V Electronics and Optoelectronics Hardheim, Germany.
P2-102
Spatially-Ingomogeneous Effects at the Interference of Electron Waves in Semiconductor 1D Nanostructures. V. A. Petrov and A. V. Nikitin
P2-103
Optimization of double barrier doped heterostructures lGaAs/GaAs/AlGaAs/GaAs for ultra high frequency FET. G. Galiev 1, V. Kaminskii 1, V. Kul'bachinskii 2. 1. Institute of UHF semiconductor electronics, RAS, Moscow, Russia; 2. Moscow State University, Moscow, Russia.
P2-104
Electronic band structure and semimetal-semiconductor transition in InAs/GaSb quantum wells. I. Lapushkin 1, A. Zakharova 1, S. T. Yen 2, K. A. Chao 3. 1. Institute of Physics and Technology of RAS, Moscow; 2. Department of Electronics Engineering, National Chiao Tung University, Hsinchu, Taiwan, Republic of China 3. Department of Physics, Lund University, Lund, Sweden.
P2-105
The influence of classical and quantum-mechanical regions interaction on IV-characteristics of RTD, based on different materials. I. I. Abramov, I. A. Goncharenko, N. V. Kolomejtseva. Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus.
P2-106
Room temperature photoreflectance investigation of undoped and doped GaAs/AlGaAs quantum well structures. L. P. Avakyants 1, P. Yu. Bokov 1, A. V. Chervyakov 1, G. B. Galiev 2, E. A. Klimov 2. 1. Physics faculty of M.V. Lomonosov Moscow State University, Moscow, Russia; 2. Institute of UHF Semiconductor Electronics RAS, Moscow, Russia.
P2-107
Negative magnetoresistance due to electron-electron interaction in InGaAs/InP heterostructures. B. Podor 1,2, I. G. Savel`ev 3, Gy. Kovacs 4, G. Remenyi 5. 1. Hungarian Academy of Sciences, Research Institute for Technical Physics and Materials Science, Budapest, Hungary; 2. Budapest Polytechnic, Kando Kalman Faculty of Electrical Engineering, Institute of Microelectronics and Technology, Budapest, Hungary; 3. A. F. Ioffe Physical Technical Institute, RAS, St. Petersburg, Russia; 4. Department of General Physics, Eotvos Lorand University, Budapest, Hungary; 5. CNRS Centre de Recherches sur les Tres Basses Temperatures et Laboratoire des Champs Magnetiques Intenses, Grenoble, France.
P2-108
Influence of a transversal electric field to acoustic charge transport in the GaAs heterostructures. V. I. grin, . . rch. Moscow Institute of Electronic Technology, Moscow, Russia.
P2-109
Spin-dependent tunneling through a symmetric barrier structure with buried electrical polarization. V. Kantser, I. Bejenari, G. Birliba. LISES Institute of Applied Physics ASM, Kishinev, Moldova.
P2-110
Change of a resistance and real structure under x-ray irradiation. V. Peregudov 1, V. Kirikov 2, E. Pashaev 2, S. Yakunin 2, A. Zaitsev 3, S. Tikhomirov2. 1. RRC "Kurchatov Institute", Moscow, Russia; 2. Institute of Crystallography, RAS, Moscow, Russia; 3. Moscow Institute of Radio Engineering and Automatics, Moscow, Russia.
P2-111
Uncooled microbolometer based on microbridge structure technology. Yu. Chetverov2, S. Shapoval1. 1. Institute of Microelectronics Technology RAS, Chernogolovka, Russia; 2. R&D Corporation "Tsiklon", Moscow, Russia.
P2-112
An investigation of relative current sensitivity of bipolar magnetotransistor. R. D. Tikhonov. SMC "Technological Centre" at the MSIEE, Moscow, Russia.
P2-113
Numerical simulation of piezoresistive effect by ISE TCAD tools for microsystems engineering elements. T. Kroupkina1, O. Pankratov2, V. Amelichev2. 1. Moscow Institute of Electronic Engineering, Moscow, Russia; 2. SMC "Technological Center" Moscow, Russia.
P2-114
Statistical Modeling for IC Manufacture: Hierarchical Approach. Yu. I. Bogdanov 1, N. A. Bogdanova 2 1. OAO Angstrem, Moscow, Russia 2. Moscow Institute of Electronic Engineering (Technical University), Moscow, Russia
P2-115
The optimization of relative current sensitivity of bipolar magnetotransistor. A. Kozlov1, M. Reveleva1, R. Tikhonov2. 1. Moscow State Institute of Electronic Technology (Technical University), Moscow, Russia; 2. SMC "Technological Center" at the MSIEE, Moscow, Russia.
P2-116
Investigation of the pressure influence on the characteristics of the silicon micromechanical oscillator. S. Timoshenkov, A. Boiko, V. Shilov, V. Rubchic. Moscow Institute of Electronic Engineering (Technical University), Moscow, Russia.
P2-117
Microtechnologies & MEMS projects. E. N. Pyatishev, Y. Akulshin, A. Kazakin, M. Lurie. St. Petersburg State Polytechnical University, St. Petersburg, Russia.
P2-118
To theory of electrophysical modification of microelectronic devices. V. M. Bogomol'nyi. Moscow State University of Service. Cherkizovo. Russia.
P2-119
Fast switching high-voltage gallium arsenide devices. A. Rozhkov, V. Kozlov. Ioffe Physico-Technical Institute RAS, St. Petersburg, Russia
P2-120
Phonon-induced decoherence of solid state charge-based quantum computer. L. Fedichkin 1, A. Fedorov 2, M. Yanchenko 3. 1. Center for Quantum Device Technology, Department of Physics and Department of Electrical and Computer Engineering, Clarkson University, Potsdam, NY, USA. 2. Department of Physics, Clarkson University, Potsdam, NY, USA. 3. Institute of Physics and Technology, RAS, Moscow, Russia.
P2-121
Microscale regulation of quantum fluctuations of light at nonlinear selective reflection. Ja. Fofanov. Institute for Analytical Instrumentation, RAS, St. Petersburg, Russia.
P2-122
Noise detector on base of a system of asymmetric loops with the persistent current. V. V. Aristov, S. V. Dubonos, V. I. Kuznetsov, A. A. Firsov, A. V. Nikulov, I. N. Zhilyaev. Institute of Microelectronics Technology and High Purity Materials, RAS, Chernogolovka, Russia.
P2-123
Phase response of spin-dependent single-hole tunneling in silicon one-dimensional rings. N. T. Bagraev1, A. D. Bouravleuv1, W. Gehlhoff2, L. E. Klyachkin1, A. M. Malyarenko1, I. A. Shelykh3. 1. A. F. Ioffe Physico-Technical Institute, St.Petersburg, Russia; 2. Technische Universitat Berlin, Institut fur Festkorperphysik, Berlin, Germany; 3. St.Petersburg State Technical University, St.Petersburg, Russia.
P2-124
Surface scattering in giant- magnetoresistance multilayered structures. V. V. V'yurkov, S. D. Ananiev, A. A. Orlikovsky. Institute of Physics and Technology of the RAS, Moscow, Russia.
P2-125
Structure of Nano-Cavities by Magnetic Resonance Methods. E. B. Fel'dman, M. G. Rudavets. Institute of Problems of Chemical Physics, RAS, Chernogolovka, Russia.
P2-126
About parallel computing on spatial rotations in spin mesomorphic structures. M. M. Nesterov, V. I. Tarkhanov. 1. St.Petersburg Institute of Informatics and Automation, RAS, St. Petersburg, Russia; 2. St. Petersburg State Polytechnical University, St. Petersburg, Russia.
P2-127
Quantum States Estimation: Root Approach. Yu. I. Bogdanov. OAO "Angstrem", Moscow, Russia.
P2-128
CANCELLED!
P2-129
The scanning single ion implanter for solid-state quantum computer. V. Zhukov. Institute for Informatics and Automation, RAS, Saint-Petersburg, Russia.
P2-130
Regularities of power consumption in quasiadiabatic logical gates. V. Staroselsky, V. Losev. Moscow State Institute of Electronic Engineering, Moscow, Russia.
P2-131
About application of logic opportunities of electron-hole plasma in the information - computing technologies. H. Karayan, A. Makaryan, G. Nikogosyan. Yerevan State University, Yerevan, Armenia.
P2-132
Physical calculations and computers. H. Karayan, Sh. Martirosyan, H. Vardanyan. Yerevan State University, Yerevan, Armenia.
P2-133
Correlation Characteristics in Multilevel Clustering Fault Model. Yu. I. Bogdanov 1, N. A. Bogdanova 2, A. V. Rudnev 1. 1. OAO Angstrem, Moscow, Russia; 2. Moscow Institute of Electronic Engineering (Technical University), Moscow, Russia.
P2-134
The tools for numerical "renascence" procedure of electrical and processes parameters of complex devices of the integrated circuits. I. I. Abramov1, V. A. Dobrushkin 2, V. A. Tsurko 3, V. A. Zhuk 4. 1. Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus; 2. Brown University, Providence, USA; 3. National Academy of Scienses, Institute of Mathematics, Minsk, Belarus; 4. Silvaco Data Systems Inc., Santa Clara, USA.
P2-135
Silicone elastoplastics for microsystem engineering. P. A. Averichkin, V. A. Kalnov, A. A. Shlionsky. FGUP "GIREDMET", Moscow, Russia. Institute of Physics and Technology, RAS, Moscow, Russia
P2-136
Quartz surface carbonilization. P. A. Averichkin, V. A. Kalnov, A. A. Shlionsky, N. I. Shmatov. FGUP "GIREDMET", Moscow, Russia. Institute of Physics and Technology, RAS, Moscow, Russia



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